Research 2: 122B

Equipment

• SUSS MICROTEC RC8-MS3 SPIN COATER
• CONTACT ALIGNER MA8
• ELLIPSOMETER
• THIN FILM STRESS MEASUREMENT
• Nanometrics Model 2100 Film Thickness Measurements
• Solitec 5110ND Developer Track
• Heraeue Vacuum Bake Oven
• Nanometrics Model 2100 Film Measurements
• Yield Engineering Model YES-5 HMDS Oven
• SUSS MA-8 Mask Aligner
• CEE Spinner
• Polymide Oven
• KOH Bench - Silicon Wafer Etching
• Solvent Station