- Room Num
- 122B
- Building
- Research 2
- Equipment
- SUSS MICROTEC RC8-MS3 SPIN COATER
- CONTACT ALIGNER MA8
- ELLIPSOMETER
- THIN FILM STRESS MEASUREMENT
- Nanometrics Model 2100 Film Thickness Measurements
- Solitec 5110ND Developer Track
- Heraeue Vacuum Bake Oven
- Nanometrics Model 2100 Film Measurements
- Yield Engineering Model YES-5 HMDS Oven