Room Num
122C
Building
Research 2
Equipment
  • THIN FILM SYSTEM, CMS-18
  • TRION TECHNOLOGY PHANTOM II
  • KLA-TENCOR P15 LONG SCAN PROFILER
  • WAFER INSP MICROSCOPE, OLYMPUS
  • PLASMA LAB 100 SYSTEM
  • PLASMALAB SYSTEM 100 PECVD
  • Acid Utility Bench
  • Blue M Friction Aire Oven
  • Tube Furnace/Carbolite
  • KLA-Tencor P11 Long Scan Profilometer
  • Wafer Inspection Microscope, MX50 Olympus
  • Semitool Spin Rinse Dryer
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