Research 2: 122C

Equipment

• THIN FILM SYSTEM, CMS-18
• TRION TECHNOLOGY PHANTOM II
• KLA-TENCOR P15 LONG SCAN PROFILER
• WAFER INSP MICROSCOPE, OLYMPUS
• PLASMA LAB 100 SYSTEM
• PLASMALAB SYSTEM 100 PECVD
• Acid Utility Bench
• Blue M Friction Aire Oven
• Tube Furnace/Carbolite
• KLA-Tencor P11 Long Scan Profilometer
• Wafer Inspection Microscope, MX50 Olympus
• Semitool Spin Rinse Dryer
• Kurt Lesker CMS-18 Sputterer (PVDI)
• Gold Target
• Platinum Target
• Utility Bench
• Flex Ovens
• Minibrute Tube Furnace