Description: PLC controller with touch screen provides an intuitive graphical interface and real time process representationFlexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibilityProprietary software control system generates process and production data for statistical process control

Contact Person: Fred Haring

Department: RCA Research Operations Core

Building: Research 2

Room: 126B

Availability: Available - Recharge Center